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  1. DIGILEM - Interferometric Endpoint Detector & Thin Film Monitor

    Interferometry is a powerful technique that can be used for endpoint detection of planar layer and trench etching, or deposition
    plasma2
    semiconductor2
    semiconductors2
    deposition2
    etch1
    interference1
    Sofie1
    endpoint1
    interferometry1
    film thickness1
    interferometers1
    plasma etch1
    end point1
    dry etching1
    thickness monitors1
    dry etch1
    thin film characterisation1
    end point detection1
    endpoint detection1
    thin film measurements1
    deposition rate1
    end point detectors1
    endpointer1
    end pointer1
    end point systems1
    endpoint systems1
    etch rate1
    thin film monitors1
    Digilem0
    etching control0
    semiconductor characterisation0

    www.digilem.com - 2009-02-08

gas3 metrology2 interferometer1 measurement2 control3 cleaning3 wireless weather station1 thin2 drying1 management5 furnace2 inspection3 film5 analysis3 thermal2 evaporation1 diet3 cooling3 dry2 calibration2 fat2

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